Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades
نویسندگان
چکیده
We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
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عنوان ژورنال:
- Micromachines
دوره 3 شماره
صفحات -
تاریخ انتشار 2012